Capacitance Manometers

Brooks Instrument
Advanced manometer technology delivers sustained vacuum accuracy.

Every vacuum pressure gauge and chamber process has a precise Torr level it must reach to sustain process yields. With industry-leading advanced sensor design features, capacitance manometers from Brooks Instrument are designed to improve manometer measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects. And because these vacuum pressure gauges are fully digital devices, Brooks capacitance manometers operate over a wide dynamic range with extremely good accuracy. The result is an exceptionally reliable family of manometers and vacuum pressure gauges for all vacuum measurement applications.

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KEY APPLICATIONS

  • Semiconductor fabrication
  • Thin-film deposition processes – glass, web and optical coatings
  • Freeze drying perishable materials
  • High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)

Select the capacitance manometer that best meets your project requirements.

PRODUCTS

CMC Series
XacTorr® Series
Product Type Capacitance Manometer Capacitance Manometer
Differentiator Unheated Heated or Unheated

Analog or Digital

 
Pressure Range 10, 20, 50, 100, 500 and 1000 Torr Full Scale 0.1, 1, 2, 10, 20, 100, 1000 Torr

mBar & Pascal References Available
Accuracy Type A = 0.25% of Reading

Type B = 0.50% of Reading

 CMX0: 0.25% of Reading

CMX1, CMX2: 1 to 1000 Torr Ranges = 0.15% of Reading

CMX1, CMX2: < 1 Torr Ranges = 0.25% of Reading
Temperature Ambient CMX0 Ambient

CMX1 45°C

CMX2 100°C

CMX3 160°C
Analog Communication 0-10 Vdc (<10k Ohm load) 0-10 Vdc 5k Ohm load
Digital Communication — DeviceNet™

RS485
Size Compact Large
Category:
Brands

Model Name APT3500
Protocol Digital Communication, HART 7, Fieldbus Foundation
Trim ability Zero, DAC, FULL
Power supply & Load Requirement 250 to 550 ohm @ 24 Vdc, Loop Powered
Falure Mode Low ≤ 3.78 mA, High ≥ 21.1 mA
External Buttons Zero & Span 2 buttons for device configuration
Process Temp. limit -40 to 120℃ ( -104 to 248℉ )
Range Abilitiy 100:1
Stability 0.125% URL for 60 months

 

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